Product Literature
INFORMATION
KDF Product Literature

600 Series

744i Series


900i Series

974i Series

PLC Retrofit

Spare Parts

Ci Cluster

Backing Plates

We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.